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Effect of the bias voltage on the structural and tribo-mechanical properties of Ag-containing amorphous carbon films
Diamond and Related Materials ( IF 4.1 ) Pub Date : 2020-05-01 , DOI: 10.1016/j.diamond.2020.107803
Wolfgang Tillmann , Nelson Filipe Lopes Dias , Dominic Stangier , Alexander Nienhaus , Carl Arne Thomann , Adrian Wittrock , Henning Moldenhauer , Jörg Debus

Abstract The modification of amorphous carbon films by a mixture of Ag atoms is a promising approach to reduce the residual stresses in the coating and to improve its adhesion to the substrate. Besides the Ag concentration, the bias voltage has a crucial impact on the properties of carbon-based films. Therefore, the effect of the bias voltage on the structural and tribo-mechanical properties of hydrogen free a-C:Ag is investigated. The a-C:Ag films are sputtered from graphite targets with varying number of Ag pellets by setting the bias voltage to −100, −150, and −200 V. A non-modified a-C and two a-C:Ag film systems with different Ag content are synthetized to obtain a comprehensive understanding about the influence of the bias voltage on the properties of the a-C:Ag films. A high bias voltage leads to a reduction in the amount of Ag within the a-C:Ag films, since impinging ions remove Ag atoms during the film growth. Additionally, XRD analyses show the formation of large Ag nanocrystallites with rising bias voltage. In Raman scattering studies, an Ag-induced graphitization of the a-C films is identified. The graphitization is less pronounced at low Ag concentrations and high bias voltages. The residual stresses increase with rising bias voltage and decreasing Ag content, which also favor greater values of hardness and elastic modulus. While a high bias voltage results in a poor adhesion strength for the a-C films, a good adhesion behavior is observed for the a-C:Ag films. It is ascribed to lower stresses in the a-C:Ag films as compared to that in a-C. The friction behavior of the a-C:Ag films is not influenced by the bias voltage, since the coefficients of friction vary from 0.26 to 0.32 against a steel counterpart in tribometer tests. An agglomeration of Ag particles in the tribological contact is observed for all a-C:Ag films which contributes to the slightly higher friction when compared to non-modified a-C films. On the whole, it is demonstrated that the tribo-mechanical properties of a-C:Ag are not only affected by the Ag content, but also by the applied bias voltage.

中文翻译:

偏压对含银非晶碳薄膜结构和摩擦力学性能的影响

摘要 通过混合银原子对无定形碳膜进行改性是降低涂层残余应力和提高其对基材的附着力的一种有前景的方法。除了银浓度外,偏置电压对碳基薄膜的性能也有至关重要的影响。因此,研究了偏置电压对无氢 aC:Ag 结构和摩擦机械性能的影响。通过将偏置电压设置为 -100、-150 和 -200 V,从具有不同数量的 Ag 颗粒的石墨靶上溅射出 aC:Ag 薄膜。一个未改性的 aC 和两个具有不同 Ag 含量的 aC:Ag 薄膜系统是合成以获得关于偏置电压对 aC:Ag 薄膜特性的影响的全面了解。高偏置电压会导致 aC:Ag 薄膜中的 Ag 含量减少,因为在薄膜生长过程中,撞击离子会去除 Ag 原子。此外,XRD 分析表明随着偏置电压的升高形成了大的 Ag 纳米微晶。在拉曼散射研究中,确定了 aC 膜的 Ag 诱导石墨化。在低 Ag 浓度和高偏置电压下,石墨化不太明显。残余应力随着偏置电压的升高和Ag含量的降低而增加,这也有利于硬度和弹性模量的更大值。虽然高偏置电压导致 aC 薄膜的粘附强度较差,但观察到 aC:Ag 薄膜的良好粘附行为。这归因于与 aC 相比,aC:Ag 薄膜中的应力较低。aC的摩擦行为:Ag 薄膜不受偏置电压的影响,因为在摩擦计测试中,与钢对应的摩擦系数从 0.26 到 0.32 不等。对于所有 aC:Ag 薄膜,在摩擦接触中观察到 Ag 颗粒的团聚,与未改性的 aC 薄膜相比,这导致摩擦稍高。总的来说,证明了 aC:Ag 的摩擦机械性能不仅受 Ag 含量的影响,还受施加的偏置电压的影响。
更新日期:2020-05-01
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