ABSTRACT High pressure/high-temperature microreactors based on silicon-Pyrex® microfabrication technologies have attracted increasing interest in various applications providing optical access in high-pressure flow processes. However, they cannot be coupled to infrared spectroscopy due to the limited optical transparency (up to ~2.7 μm in the infrared region) of the Pyrex® glass substrate employed in the microreactor fabrication. To address this limitation, the alternative approach proposed in this work consists in replacing the Pyrex® glass in the microreactor by a mid-infrared transparent glass with thermal and mechanical properties as close as possible or even better to those of the Pyrex®, including its ability for silicon-wafers coupling by the anodic bonding process. Glasses based on germanate GeO2, known for their excellent transmission in the mid-infrared range and thermal/thermo-mechanical properties, have been thus evaluated and developed for this purpose. The optical, mechanical, thermal and electrical conductivity properties of adapted glass compositions belonging to five vitreous systems have been systemically investigated. The glass composition 70GeO2-15Al2O3-10La2O3-5Na2O (mol.%) was defined as the best candidate and produced in large plates of 50 mm diameter and 1 mm thickness. Anodic bonding tests with Si-wafers have been then successfully conducted, paving the way for the development of fully mid-infrared transparent silicon-glass microreactors.

中文翻译：

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用于高压-高温微流体应用的中红外透明锗酸盐玻璃的阳极键合

摘要 基于硅-Pyrex® 微加工技术的高压/高温微反应器引起了对在高压流动过程中提供光学通路的各种应用的越来越多的兴趣。然而，由于微反应器制造中使用的 Pyrex® 玻璃基板的光学透明度有限（红外区域高达 ~2.7 μm），它们无法与红外光谱耦合。为了解决这个限制，这项工作中提出的替代方法包括用中红外透明玻璃代替微反应器中的 Pyrex® 玻璃，其热和机械性能尽可能接近甚至更好地与 Pyrex® 的那些，包括其通过阳极键合工艺进行硅晶片耦合的能力。基于锗酸盐GeO2的玻璃，以其出色的中红外范围传输和热/热机械性能而闻名，因此已为此目的进行评估和开发。已经系统地研究了属于五种玻璃体系统的适应玻璃组合物的光学、机械、导热和导电性能。玻璃成分 70GeO2-15Al2O3-10La2O3-5Na2O (mol.%) 被定义为最佳候选物，并在直径为 50 毫米、厚度为 1 毫米的大板中生产。随后成功进行了与硅晶片的阳极键合测试，为开发全中红外透明硅玻璃微反应器铺平了道路。已经系统地研究了属于五种玻璃体系统的适应玻璃组合物的导热和导电性能。玻璃成分 70GeO2-15Al2O3-10La2O3-5Na2O (mol.%) 被定义为最佳候选物，并在直径为 50 毫米、厚度为 1 毫米的大板中生产。随后成功进行了与硅晶片的阳极键合测试，为开发全中红外透明硅玻璃微反应器铺平了道路。已经系统地研究了属于五种玻璃体系统的适应玻璃组合物的导热和导电性能。玻璃成分 70GeO2-15Al2O3-10La2O3-5Na2O (mol.%) 被定义为最佳候选物，并在直径为 50 毫米、厚度为 1 毫米的大板中生产。随后成功进行了与硅晶片的阳极键合测试，为开发全中红外透明硅玻璃微反应器铺平了道路。