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Determination of the polymeric thin film thickness by energy dispersive X-ray fluorescence and multivariate analysis
Spectrochimica Acta Part B: Atomic Spectroscopy ( IF 3.3 ) Pub Date : 2020-05-01 , DOI: 10.1016/j.sab.2020.105818
Eduardo de Almeida , Fábio L. Melquiades , João P.R. Marques , Eva Marguí , Hudson W.P. de Carvalho

Abstract The objective of this work was to investigate the potential of energy dispersive X-ray fluorescence spectrometry for polymeric thin film thickness measurements using univariate and multivariate statistical tools. To this end, nine polymeric films 1.5 to 7.6 μm thick with different composition were used for calibration and validation purposes. The univariate approach was not suitable as thickness measurement strategy, because the coefficient of determination (R2) between the Rh-Kα Compton (18.54–19.83 keV) counting rate and the thin film thickness was estimated as 0.873 (n = 9). Even lower R2 values were estimated for other X-ray spectral regions. On the other hand, the multivariate approach proved to be appropriated for the polymeric thin film thickness measurement, presenting satisfactory R2 values (0.993–0.998; n = 8), precision (4%) and recovery (97%). The scanning electron microscopy was employed for validation of the proposed multivariate strategy. One can concluded that we show that the energy dispersive X-ray fluorescence using multivariate approach is a powerful non-destructive tool to measure the polymeric thin film thickness.

中文翻译:

通过能量色散 X 射线荧光和多元分析测定聚合物薄膜厚度

摘要 这项工作的目的是使用单变量和多变量统计工具研究能量色散 X 射线荧光光谱法在聚合物薄膜厚度测量中的潜力。为此,使用了九个 1.5 到 7.6 μm 厚且成分不同的聚合物薄膜进行校准和验证。单变量方法不适合作为厚度测量策略,因为 Rh-Kα Compton (18.54–19.83 keV) 计数率和薄膜厚度之间的决定系数 (R2) 估计为 0.873 (n = 9)。对于其他 X 射线光谱区域,估计的 R2 值甚至更低。另一方面,多元方法被证明适用于聚合物薄膜厚度测量,呈现令人满意的 R2 值(0.993-0.998;n = 8),精密度 (4%) 和回收率 (97%)。扫描电子显微镜被用于验证所提出的多变量策略。可以得出结论,我们表明使用多元方法的能量色散 X 射线荧光是一种强大的非破坏性工具,可用于测量聚合物薄膜的厚度。
更新日期:2020-05-01
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