当前位置: X-MOL 学术Analog Integr. Circ. Signal Process. › 论文详情
Our official English website, www.x-mol.net, welcomes your feedback! (Note: you will need to create a separate account there.)
Design and analysis of serpentine meander asymmetric cantilever RF-MEMS shunt capacitive switch
Analog Integrated Circuits and Signal Processing ( IF 1.4 ) Pub Date : 2020-03-02 , DOI: 10.1007/s10470-020-01606-z
B. V. S. Sailaja , Ketavath Kumar Naik

Abstract

In this paper, the design of asymmetric cantilever radio frequency micro electromechanical system (RF-MEMS) capacitive shunt switch is presented. The analysis and design have considered for single meander, uniform serpentine and non-uniform serpentine asymmetric cantilever RF-MEMS capacitive shunt switches were proposed. The non-uniform serpentine meander cantilever structure shows better performance compared to other structures. The actuation voltage attained for the serpentine meander cantilever is 1.1 V, 3.2 V with the spring constants 0.03 N m, 0.32 N m for the left and right cantilevers respectively. The proposed model isolations observed in-off states at left, right and both side cantilevers are − 52 dB, − 61 dB, − 45 dB at frequency of 7 GHz, 11.1 GHz, 12 GHz respectively. The proposed device insertion loss is − 0.2 dB and return loss is − 44 dB over 12 GHz is observed at on-state of the proposed model. The performance parameters are also observed for spring constant, pull in voltage, quality factor, stress analysis, switching time, resistance, inductance, capacitance, stiction loss and variation of gap with respect to spring constants and actuation voltages are calculated and analysed.



中文翻译:

蛇形曲折非对称悬臂射频微机电并联电容开关的设计与分析

摘要

本文提出了非对称悬臂式射频微机电系统(RF-MEMS)电容式并联开关的设计。分析和设计考虑了单曲,提出了均匀的蛇形和不均匀的蛇形非对称悬臂RF-MEMS电容并联开关。与其他结构相比,非均匀蛇形曲折悬臂结构表现出更好的性能。蜿蜒曲折的悬臂可达到的驱动电压为1.1 V,3.2 V,左右悬臂的弹簧常数分别为0.03 N m,0.32 N m。在7 GHz,11.1 GHz和12 GHz的频率下,在左侧,右侧和两侧悬臂的开关状态下观察到的建议模型隔离分别为-52 dB,-61 dB,-45 dB。建议的设备插入损耗为− 0。在建议模型的导通状态下,在12 GHz上观察到2 dB的回波损耗为-44 dB。还可以观察到性能参数,包括弹簧常数,吸合电压,品质因数,应力分析,切换时间,电阻,电感,电容,静摩擦损失以及相对于弹簧常数和致动电压的间隙变化,并进行了分析。

更新日期:2020-03-03
down
wechat
bug