A novel low-coherence phase-shifting shearing interferometer for measuring parallelism of parallel surfaces of transparent samples was proposed in this research; wherein the shear devices are two identical Savart prisms, the first one laterally separates the incident beam into two linearly polarized beams vibrating perpendicularly, and the second recombines the separated beams after they pass through the sample being examined; the phase-shifter is an assembly of the second Savart prism and a rotation stage; and the measurements are done by two operations: derivative determination and Frankot–Chellappa reconstruction. This paper sequentially introduces the configuration, measurement theory, and experimental setup of the interferometer; it then presents and discusses the results from the uses of the experiment setup. The results not only verify the validity and feasibility of the interferometer but also exhibit a maximum standard deviation of repeated measurements of 0.018 μm.

提出了一种新颖的低相干相移剪切干涉仪，用于测量透明样品平行表面的平行度。其中剪切装置是两个相同的Savart棱镜，第一个将入射光束横向分离成两个垂直振动的线性偏振光束，第二个将分离的光束通过被检样品后重新组合。移相器是第二萨瓦特棱镜和旋转台的组件。测量是通过两个操作完成的：导数确定和Frankot-Chellappa重建。本文依次介绍了干涉仪的配置，测量原理和实验装置。然后介绍并讨论了使用实验装置的结果。