Electron cyclotron resonance ion sources (ECRISs) are widely applied for ion beam applications, e.g., plasma processing, cancer therapy, and ion engine of an artificial satellite. In our ECRIS, we aim at producing and extracting various ion beams from this device, in particular, Xeq+ ion beams at low energy. In the aerospace engineering field, there are problems of accumulated damages on various component materials caused by low energy of Xe ions from the engine. There are not enough experimental sputtering data for satellite materials at the Xeq+ in the low energy region. Then, we are trying to investigate the sputtering yield experimentally by irradiating the low energy Xe ion beams. To perform this experiment, it is necessary to acquire a certain amount of beam current with low energy. Then, we generate the low energy ion beams by the following steps: First, the ion beams are extracted from the ECRIS at high voltage. Next, these are transported to an ion beam irradiation system (IBIS). Finally, the ion beams are decelerated by the deceleration voltage in the IBIS. We adjusted the beamline. We measure the characteristics of the transport efficiency and decelerated ion beam currents. In this paper, we describe the experimental setup using an existing ECRIS for decelerated heavy ion beams and the results of decelerated ion beam currents.

中文翻译：

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改善来自电子回旋共振多电荷离子源的离子束的传输和优化减速

电子回旋共振离子源（ECRIS）广泛应用于离子束应用，例如等离子体处理、癌症治疗和人造卫星的离子引擎。在我们的 ECRIS 中，我们的目标是从该设备中产生和提取各种离子束，特别是低能量的 Xeq+ 离子束。在航空航天工程领域，存在发动机氙离子能量低导致各种部件材料累积损伤的问题。低能区 Xeq+ 卫星材料的实验溅射数据不足。然后，我们试图通过照射低能量氙离子束来实验研究溅射产额。为了进行这个实验，需要获得一定量的低能量束流。然后，我们通过以下步骤产生低能离子束：首先，在高电压下从 ECRIS 中提取离子束。接下来，这些被传输到离子束辐照系统 (IBIS)。最后，离子束被 IBIS 中的减速电压减速。我们调整了光束线。我们测量传输效率和减速离子束电流的特性。在本文中，我们描述了使用现有 ECRIS 进行减速重离子束的实验设置和减速离子束电流的结果。我们测量传输效率和减速离子束电流的特性。在本文中，我们描述了使用现有 ECRIS 进行减速重离子束的实验设置和减速离子束电流的结果。我们测量传输效率和减速离子束电流的特性。在本文中，我们描述了使用现有 ECRIS 进行减速重离子束的实验设置和减速离子束电流的结果。