In order to miniaturize components, planar technology has become essential. For frequency characterization of integrated quadrupole devices, only network vector analyzers can be used, but these instruments cannot be employed for frequencies below a few MHz. At these frequencies, only the impedance-meter allows devices to be measured. But, this instrument only measures dipole devices. Thus, the objective of this paper is to present a characterization method using an impedance-meter in order to characterize integrated quadrupole devices. The implemented method allows all elements of an electrical model of integrated component to be extracted with low uncertainties (less than 3%) over the entire study band.

为了使组件最小化，平面技术已经变得至关重要。对于集成四极杆设备的频率表征，只能使用网络矢量分析仪，但是这些仪器不能用于低于几个MHz的频率。在这些频率下，只有阻抗计可以测量设备。但是，该仪器只能测量偶极子设备。因此，本文的目的是提出一种使用阻抗计的表征方法，以表征集成的四极器件。实施的方法允许在整个研究范围内以低不确定性（小于3％）提取集成组件电气模型的所有元素。