This article presents a novel piezo-actuated fast steering mirror (FSM) and focuses on the integration of control design and system operation in order to improve its tracking performance for high-speed scanning. The FSM is centered around a membrane-like flexure design and two pairs of stack actuators operated in a push-pull configuration, employing an optical sensor for position measurement. With the flexure membrane, the first fundamental resonance mode is placed as high as 6.7 kHz, while still enabling an angular range of ±2.4 mrad mechanical. This results in the highest performance metric given by the product of mechanical range times main resonance mode frequency reported for piezo FSMs so far. To improve the tracking performance under high-speed scanning compared to a conventional raster scan operation, an integrated control and trajectory design yields a Lissajous trajectory together with tailored single tone and dual tone feedback controllers. It is demonstrated that in the Lissajous scan case, the rms tracking error can be reduced by one order of magnitude, as compared to the conventional raster scan case with a PI ₊ controller providing a closed-loop bandwidth of 2.7 kHz.

中文翻译：

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高性能压电致动快速转向镜的控制设计与系统操作的集成

本文介绍了一种新颖的压电致动快速转向镜（FSM），并着重于控制设计和系统操作的集成，以提高其在高速扫描中的跟踪性能。FSM围绕膜状挠性设计和两对以推挽配置操作的堆栈执行器为中心，采用光学传感器进行位置测量。使用挠性膜时，第一个基本共振模式的频率高达6.7 kHz，同时仍可实现±2.4 mrad机械角范围。到目前为止，这是由机械范围乘以压电FSM报告的主共振模式频率的乘积得出的最高性能指标。与传统的光栅扫描操作相比，为了提高高速扫描下的跟踪性能，集成的控制和轨迹设计产生了李沙育轨迹以及量身定制的单音和双音反馈控制器。结果表明，与具有PI的常规光栅扫描案例相比，在Lissajous扫描案例中，均方根跟踪误差可以降低一个数量级。 ₊控制器提供2.7 kHz的闭环带宽。