This contribution demonstrates experimentally how a series of annular dark-field transmission images collected in a scanning electron microscope (SEM) with a basic solid-state detector can be used to quantify electron scattering distributions (i.e., diffraction patterns). The technique is demonstrated at different primary electron energies with a polycrystalline aluminum sample and two amorphous samples comprising vastly different mass-thicknesses. Contrast reversal is demonstrated in both amorphous samples, suggesting that intuitive image contrast interpretation is not always straightforward even for ultrathin, low atomic number samples. We briefly address how the scattering distributions obtained here can be used as an aid to interpret contrast in annular dark-field images, and how to set up imaging conditions to obtain intuitively interpretable contrast from samples with regions of significantly different thickness.

中文翻译：

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从环形暗场 STEM-in-SEM 图像中获取衍射图案：更好地理解图像对比度

这一贡献通过实验证明了如何使用扫描电子显微镜 (SEM) 和基本固态探测器收集的一系列环形暗场透射图像来量化电子散射分布（即衍射图案）。该技术是在不同的初级电子能量下用一个多晶铝样品和两个包含极大不同质量厚度的无定形样品来证明的。在两种无定形样品中都证明了对比度反转，这表明即使对于超薄、低原子序数的样品，直观的图像对比度解释也并不总是那么简单。我们简要介绍了如何将此处获得的散射分布用作解释环形暗场图像中对比度的辅助工具，