Abstract Subsurface damage (SSD) and surface roughness (SR) induced by the finishing process significantly influence the industrial and technological application of optical components. In this paper, a novel non-resonant vibration-assisted roll-type polishing (NVRP) was presented to process the silicon carbide (SiC) ceramic workpiece. The feasibility of the two-dimensional vibration-assisted processing device (2D-VPD) was verified, and the predicted value of SSD was modelled. Besides, the surface deformation and SSD during the polishing process of the SiC workpiece were discussed by numerical simulation. To experimentally verify the proposed polishing method, a set of contrast experiments were conducted on SiC samples to evaluate the effects of different processing conditions on SR and SSD quantitatively. The experimental results further demonstrated a good consistency with the theoretical values in terms of SSD depth, considering the rotational angle of the grain and polishing depth. Also, relatively lower subsurface/surface damages and good surface uniformity were achieved through combining non-resonant vibration-assisted technology and roll-type polishing system. Finally, the comparative experiment of the material removal rate (MRR) between NVRP and non-vibration roll-type polishing (NRP) is conducted.

中文翻译：

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新型非共振振动辅助辊式抛光对碳化硅陶瓷亚表面损伤及表面质量的研究

摘要 精加工过程引起的次表面损伤（SSD）和表面粗糙度（SR）显着影响光学元件的工业和技术应用。在本文中，提出了一种新型非共振振动辅助辊式抛光 (NVRP) 来处理碳化硅 (SiC) 陶瓷工件。验证了二维振动辅助处理装置（2D-VPD）的可行性，并对SSD的预测值进行建模。此外，通过数值模拟讨论了SiC工件抛光过程中的表面变形和SSD。为了通过实验验证所提出的抛光方法，对 SiC 样品进行了一组对比实验，以定量评估不同加工条件对 SR 和 SSD 的影响。考虑到晶粒的旋转角度和抛光深度，实验结果进一步证明了 SSD 深度与理论值的良好一致性。此外，通过结合非共振振动辅助技术和辊式抛光系统，实现了相对较低的次表面/表面损伤和良好的表面均匀性。最后，对NVRP与非振动辊式抛光（NRP）的材料去除率（MRR）进行了对比实验。