Abstract The phase-structural state of Fe, Fe(1−x)Nx, Fe(1−y)Zry, and Fe(90−z)Zr10Nz films obtained by reactive magnetron sputtering under different energy and gas-atmosphere conditions was studied. It is shown that impurity elements (N, O) absorbed by the films during the deposition process along with the principal elements (Fe, Zr, N) participate in the formation of the phase composition and structure of the films. The phenomena of the formation of supersaturated bcc Fe(N) and/or bcc Fe(Zr) solid solutions and high-temperature modifications (which are non-equilibrium at room temperature) of the bcc Zr and fcc ZrO2 phases in the films are substantiated by the fundamental concepts of the metal physics.

中文翻译：

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FeZrN 薄膜：直流磁控溅射条件在其元素和相组成形成中的作用

摘要 研究了反应磁控溅射在不同能量和气体-气氛条件下获得的Fe、Fe(1-x)Nx、Fe(1-y)Zry和Fe(90-z)Zr10Nz薄膜的相结构状态。结果表明，在沉积过程中被薄膜吸收的杂质元素（N、O）与主要元素（Fe、Zr、N）一起参与了薄膜的相组成和结构的形成。证实了膜中形成过饱和的 bcc Fe(N) 和/或 bcc Fe(Zr) 固溶体以及 bcc Zr 和 fcc ZrO2 相的高温改性（在室温下不平衡）的现象通过金属物理学的基本概念。