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Fabrication of TiO2 Micropatterns on Flexible Substrates by Vacuum‐Ultraviolet Photochemical Treatments
Advanced Materials Interfaces ( IF 5.4 ) Pub Date : 2020-02-13 , DOI: 10.1002/admi.201901634
Cheng‐Tse Wu 1 , Ahmed I. A. Soliman 1, 2 , Yudi Tu 1 , Toru Utsunomiya 1 , Takashi Ichii 1 , Hiroyuki Sugimura 1
Affiliation  

Titanium dioxide (TiO2) micropatterns have received great attention for application in photocatalysis, electronics, and optoelectronics. Formation of such micropatterns on polymer substrates is of importance in flexible device fabrication. Vacuum ultraviolet (VUV) oxidative treatment applied on metalorganic precursor gel films serves as a strategy to fabricate metal oxide films on heat‐sensitive substrates such as polymers. Here, 172 nm VUV oxidative treatment through a photomask is used to directly convert the titanium metalorganic precursor films into TiO2 patterns without further heat annealing. In comparison to the commonly used alkoxide‐based precursors, titanium acetylacetonate proves to be an appropriate precursor due to its chemical stability in an ambient environment. With this precursor, clear removal of untreated precursor gels is achieved, resulting in well‐defined amorphous TiO2 micropatterns with a minimum feature of 1 µm and a small edge roughness less than ≈4%. The innovativeness arises from the one‐step VUV photochemical conversion in the whole ambient conditions, which largely reduces complex processes, for example, nitrogen‐filled glovebox or post‐heat treatments. High‐quality amorphous TiO2 micropatterns can be applied to device fabrication of solar cells and memories. This patterning approach highlighting TiO2 can be also extended to other metal oxides, which has great potential in surface and device processing.

中文翻译:

真空紫外光化学处理在柔性基板上制备TiO2微图案

二氧化钛(TiO 2)微图案在光催化,电子学和光电子学中的应用受到了极大的关注。在聚合物基底上形成这种微图案对于柔性器件制造是重要的。在有机金属前体凝胶膜上进行的真空紫外线(VUV)氧化处理是一种在热敏性基材(例如聚合物)上制造金属氧化物膜的策略。此处,通过光掩模进行的172 nm VUV氧化处理将钛金属有机前体膜直接转化为TiO 2图案,无需进一步加热退火。与常用的基于醇盐的前体相比,乙酰丙酮钛由于在环境中的化学稳定性而被证明是合适的前体。使用该前体,可以清晰地去除未处理的前体凝胶,从而形成轮廓分明的无定形TiO 2微图案,其最小特征为1 µm,边缘粗糙度小于≈4%。创新性源自在整个环境条件下的一步式VUV光化学转化,这大大减少了复杂的过程,例如充氮手套箱或后热处理。高质量的非晶TiO 2微图案可用于太阳能电池和存储器的器件制造。这种图案化方法突出了TiO2也可以扩展到在表面和器件加工中具有巨大潜力的其他金属氧化物。
更新日期:2020-02-13
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