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Metalens With Artificial Focus Pattern
IEEE Photonics Technology Letters ( IF 2.6 ) Pub Date : 2020-03-01 , DOI: 10.1109/lpt.2020.2970507
Mao Ye , Vishva Ray , Dachuan Wu , Ya Sha Yi

Metalens as one of the most popular applications of emerging optical metasurfaces has raised widespread interest recently. With nano structures fully controlling phase, polarization and transmission, metalens has achieved comparable performance of commercial objective lenses. While recent studies seeking for the accomplishment of traditional focusing behaviors through metalens are successful, in this work, we have discovered that instead of focusing light to a point, metasurface further enables shaping the focus into flexibly designed patterns, with more promises and potentials. New mechanism and generalizations of conventional point-focused metalens guiding principles have been proposed with metalens concentrating light to artificial focus pattern. As proving examples, the metalens with ‘M’ shaped focus are fabricated and characterized. It is fabricated with a single layer of silicon-based material through CMOS compatible nano fabrication process. The mechanism to generate artificial focus pattern can be applied to a plethora of future on-chip optical devices with applications ranging from beam engineering to next generation nano lithography.

中文翻译:

具有人工聚焦模式的元透镜

超透镜作为新兴光学超表面最流行的应用之一,最近引起了广泛的兴趣。凭借纳米结构完全控制相位、偏振和透射,超透镜已经实现了与商业物镜相当的性能。虽然最近寻求通过超透镜实现传统聚焦行为的研究取得了成功,但在这项工作中,我们发现,不是将光聚焦到一个点,超曲面进一步能够将焦点塑造成灵活设计的模式,具有更多的前景和潜力。已经提出了传统点聚焦元透镜指导原则的新机制和概括,其中元透镜将光集中到人工聚焦图案。作为证明示例,制造并表征了具有“M”形焦点的超透镜。它是通过与 CMOS 兼容的纳米制造工艺用单层硅基材料制造的。产生人工聚焦图案的机制可以应用于大量未来的片上光学器件,其应用范围从光束工程到下一代纳米光刻。
更新日期:2020-03-01
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