Mo–S–Ti composite films deposited by magnetron sputtering were irradiated by 2 MeV Au 2+ with a high fluence of 3.3 × 10 15 ion cm −2 . Upon intense bombardment by 2 MeV Au 2+ , the Mo–S–Ti thin film exhibits sensitivity to radiation-induced amorphization at room temperature. Afterwards, thermal annealing experiments on the irradiated thin films were conducted over the temperature range of 200 °C–900 °C. Subsequent annealing experiments found that the effect of heavy ion irradiation on Mo–S–Ti films was a reversible reaction, with the irradiation-damaged MoS 2 lattice being completely self-repaired by thermal annealing. In the annealing temperature range of 200 °C–600 °C, no evidence of an amorphous to recrystallized transition was observed. When the temperature was increased to as high as 700 °C, the damaged MoS 2 molecules were well recrystallized. HRTEM images of irradiated samples annealed at 700 °C strikingly found...

中文翻译：

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离子辐照通过热退火对Mo–S–Ti（MoST）润滑膜进行自我修复

通过磁控溅射沉积的Mo-S-Ti复合膜被2 MeV Au 2+辐照，其通量为3.3×10 15 ion cm -2。在2 MeV Au 2+的强烈轰击下，Mo–S–Ti薄膜在室温下对辐射诱导的非晶化表现出敏感性。之后，在200°C–900°C的温度范围内对被辐照的薄膜进行热退火实验。随后的退火实验发现，重离子辐照对Mo–S–Ti薄膜的影响是可逆的，受辐照损坏的MoS 2晶格可通过热退火完全自我修复。在200°C–600°C的退火温度范围内，没有观察到从非晶态到重结晶转变的迹象。当温度升高到700°C时，受损的MoS 2分子充分重结晶。惊人地发现在700°C退火的辐照样品的HRTEM图像...