There is increased interest in flexible substrate-based piezoelectric energy harvester (PEH) for self-powered wireless sensor nodes, due to their low-cost and environmental friendliness. However, it presents fabrication challenges due to the low-temperature process and formation of a highly polar β-phase of a polymer film on a flexible substrate. In this work, first, we optimize the deposition parameters to grow the polar β-phase of poly vinylidene fluoride trifluoroethylene (PVDF-TrFE) film on Polyethylene terephthalate (PET) substrate. Using optimized PVDF-TrFE film, rectangular shape PEH is fabricated on a flexible Mo/PET substrate and characterized for voltage and power. It is found that the maximum measured power is 6.83 μW with input acceleration of 1.0 g. Further, we develop a novel analytical approach using a mass-spring damper model of PEH to predict the resonance frequency and output power. The fabricated and model results are shown to match well with mechanical and induced electrical damping as fitting parameters. The maximum measured power density from the flexible substrate based PEH is found to be 312.85 μW/cm³. The obtained power density is better than similar reported devices, with the advantage of low-cost material and fabrication. The optimized and low frequency PEHs reported in this work have a high potential for the wireless sensor node applications, such as monitoring of water bodies and plant health monitoring in agriculture, etc.

由于其低成本和环境友好性，人们越来越关注用于自供电无线传感器节点的基于柔性基板的压电能量收集器（PEH）。然而，由于低温工艺和在柔性基板上形成聚合物膜的高极性β相，这带来了制造挑战。在这项工作中，首先，我们优化沉积参数以在聚对苯二甲酸乙二酯（PET）基底上生长聚偏二氟乙烯三氟乙烯（PVDF-TrFE）膜的极性β相。使用优化的PVDF-TrFE膜，可在柔性Mo / PET基板上制造矩形PEH，并对其电压和功率进行表征。发现在1.0 g的输入加速度下，最大测量功率为6.83μW。进一步，我们使用PEH的质量弹簧阻尼器模型开发了一种新颖的分析方法，以预测共振频率和输出功率。所显示的制造结果和模型结果与机械阻尼和感应电阻尼作为拟合参数非常匹配。发现基于柔性基板的PEH的最大测量功率密度为312.85μW/ cm³。所获得的功率密度优于同类报道的设备，并具有低成本的材料和制造优势。这项工作中报告的经过优化的低频PEH在无线传感器节点应用中具有很高的潜力，例如水体监测和农业中的植物健康监测等。