In high power impulse magnetron sputtering (HiPIMS) bright plasma spots are observed during the discharge pulses that rotate with velocities in the order of 10 km s −1 in front of the target surface. It has proven very difficult to perform any quantitative measurements on these so-called spokes, which emerge stochastically during the build-up of each plasma pulse. In this paper, we propose a new time shift averaging method to perform measurements integrating over many discharge pulses, but without phase averaging of the spoke location, thus preserving the information of the spoke structure. This method is then applied to perform Langmuir probe measurements, employing magnetized probe theory to determine the plasma parameters inside the magnetic trap region of the discharge. Spokes are found to have a higher plasma density, electron temperature and plasma potential than the surrounding plasma. The electron density slowly rises at the leading edge of the spoke to ...

中文翻译：

---

HiPIMS中的电子密度，温度和辐条的电势结构

在高功率脉冲磁控溅射（HiPIMS）中，在放电脉冲期间会观察到明亮的等离子体斑点，该放电脉冲在目标表面的前面以大约10 km s -1的速度旋转。事实证明，对这些所谓的辐条进行任何定量测量非常困难，辐条在每个等离子脉冲形成期间随机出现。在本文中，我们提出了一种新的时移平均方法，该方法可以对多个放电脉冲进行积分测量，但无需对轮辐位置进行相位平均，从而保留了轮辐结构的信息。然后将该方法应用于执行Langmuir探针测量，采用磁化探针理论确定放电磁阱区域内的等离子体参数。发现辐条的等离子体密度更高，电子温度和等离子体电势要比周围的等离子体高。电子密度在辐条的前缘缓慢上升至...