Pt thin film temperature sensors (Pt T sensors) are embedded in micro gas sensors to measure and control the working temperature. We characterized electrical resistances of Pt T sensors and micro heaters with temperature changing in the oven and by Joule heating. In order to enhance the accuracy of temperature measurement by the Pt T sensors, we investigated the correlation among the Pt T sensor, micro heater, and the working temperature, which was linear proportional relation expressed as the equation: T2 = 6.466R1–642.8, where T2 = temperature of the Pt micro heater and R1 = the electrical resistance of the Pt T sensor. As the error by physically separated gap between Pt T sensor and micro heater calibrated, measuring and controlling temperature of micro heater in micro gas sensors were possible through the Pt T sensors. For the practical use of Pt T sensor in micro gas sensor, the gas sensing properties of fabricated micro gas sensors to 25 ppm CO and 1 ppm HCHO gases were characterized.

中文翻译：

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使用微气体传感器中嵌入的Pt薄膜温度传感器对微加热器进行温度控制

Pt薄膜温度传感器（Pt T传感器）嵌入微气体传感器中，以测量和控制工作温度。我们利用烤箱中的温度变化和焦耳加热来表征Pt T传感器和微型加热器的电阻。为了提高Pt T传感器进行温度测量的准确性，我们研究了Pt T传感器，微型加热器和工作温度之间的相关性，其线性比例关系表示为等式：T2 = 6.466R1–642.8，其中T2 = Pt微型加热器的温度，R1 = Pt T传感器的电阻。由于校准了Pt T传感器和微加热器之间的物理分隔间隙而引起的误差，因此通过Pt T传感器可以测量和控制微气体传感器中的微加热器的温度。