We fabricated ordered micro/nano patterns induced by controlled dewetting on the topographically patterned PS/P4VP bilayer thin film. The method is based on utilizing microimprinting lithography to induce a topographically heterogeneous bilayer film that allows the controlled dewetting upon subsequent thermal annealing. The dewetting that was initiated strictly at the boundary of the thicker and thinner regions was guided by the presence of the topographic structure. The dewetting front velocity of the microdomains in the confined regions was linearly proportional to the measurement time, which enabled us to control the size of the dewet domain with annealing time. In particular, the submicron sized dot arrays between lines were generated with ease when the dewetting was confined into geometry with a few microns in size. The kinetically driven, non-lithographical pattern structures accompanied the pattern reduction to 400%. The pattern arrays on a transparent glass substrate were especially useful for noncircular microlens arrays where the focal length of the lens was easily tunable by controlling the thermal annealing.

中文翻译：

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通过压印聚合物薄膜的有限润湿来形成有序微图案及其微透镜应用

我们在地形图案化的PS / P4VP双层薄膜上制造了有序的微/纳米图案，这些图案是由受控的去湿引起的。该方法基于利用微压印光刻技术来诱导形貌异质的双层膜，该膜允许在随后的热退火时进行受控的去湿。严格在较厚和较薄区域的边界处开始的去湿是由地形结构的存在引导的。受限区域中微区的去湿前沿速度与测量时间成线性比例，这使我们能够通过退火时间来控制去湿区的大小。特别地，当将反润湿限制为几微米大小的几何形状时，容易产生线之间的亚微米尺寸的点阵列。动力驱动的 非光刻图案结构伴随图案减少至400％。透明玻璃基板上的图案阵列对于非圆形微透镜阵列特别有用，在非圆形微透镜阵列中，通过控制热退火可以轻松调节透镜的焦距。