A new type of metal film on a polyethylene terephthalate (PET) substrate was fabricated with a pattern of holes using a photolithography-based wet process, and its application to the interconnection designof flexible electronic devices was demonstrated. The intended diameters for the holes in the patterns of the metal films were 10 μm, 30μm and 50μm. The hole-patterned samples showed much better electrical properties in the high-strain region. Furthermore, the absolute value of the electrical resistance for the hole-patterned sample was low, even by comparison with a no-pattern sample, for some of the critical values of tensile strain. The results of this study show potential application to the interconnection designof flexible electronic devices.

利用基于光刻的湿法工艺，在具有孔眼图案的聚对苯二甲酸乙二醇酯（PET）基板上制备了一种新型的金属膜，并证明了其在柔性电子设备互连设计中的应用。金属膜的图案中的孔的预期直径为10μm，30μm和50μm。带有孔的样品在高应变区域表现出更好的电性能。此外，对于孔图案样品的电阻的绝对值对于拉伸应变的一些临界值而言甚至与无图案样品相比也较低。这项研究的结果显示了在柔性电子设备互连设计中的潜在应用。