A very low-profile sub-THz high-gain frequency beam steering antenna, enabled by silicon micromachining, is reported for the first time in this paper. The operation bandwidth of the antenna spans from 220 to 300 GHz providing a simulated field of view of 56°. The design is based on a dielectric filled PPW leaky-wave antenna fed by a pillbox. The pillbox, a two-level PPW structure, has an integrated parabolic reflector to generate a planar wave front. The device is enabled by two extreme aspect ratio, 16 $\times$ 16 mm large perforated membranes, which are only 30 $\mu \text{m}$ thick, that provide the coupling between the two PPWs and form the LWA. The micromachined low-loss PPW structure results in a measured average radiation efficiency of −1 dB and a maximum gain of 28.5 dBi with an input reflection coefficient below −10 dB. The overall frequency beam steering frontend is extremely compact (24 $\times$ 24 $\times$ 0.9 mm) and can be directly mounted on a standard WM-864 waveguide flange. The design and fabrication challenges of such high performance antenna in the sub-THz frequency range are described and the measurement results of two fabricated prototypes are reported and discussed.

中文翻译：

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一种由硅微加工实现的薄型和高增益频率波束控制亚太赫兹天线

本文首次报道了一种由硅微加工技术实现的超薄亚太赫兹高增益频率波束控制天线。天线的工作带宽范围为 220 至 300 GHz，提供 56° 的模拟视场。该设计基于由药盒馈电的电介质填充 PPW 漏波天线。药盒是一种两级 PPW 结构，具有集成的抛物面反射器以产生平面波前。该设备由两个极端纵横比启用，16 $\times$ 16 mm 大穿孔膜，仅为 30 $\mu \text{m}$ 厚，提供两个 PPW 之间的耦合并形成 LWA。微机械加工的低损耗 PPW 结构导致测量的平均辐射效率为 -1 dB，最大增益为 28.5 dBi，输入反射系数低于 -10 dB。整个频率波束控制前端非常紧凑（24 $\times$ 24 $\times$ 0.9 mm)，可直接安装在标准 WM-864 波导法兰上。描述了亚太赫兹频率范围内这种高性能天线的设计和制造挑战，并报告和讨论了两个制造原型的测量结果。