Bi‐material microcantilevers have been widely used as both thermal sensors and thermal actuators. Carbon nanotubes (CNT) are prominent candidates for bi‐material actuators due to the negative coefficient of thermal expansion (CTE) at the axial direction that allows for higher thermal sensitivity. However, CNT‐based actuators generally suffer not only from intertube slipping due to weak interactions between the assembled CNTs but also from poor control over orientation assembly. To address these challenges, a new class of closely packed, highly aligned CNT microcantilevers reinforced by ceramic interlocking is here proposed, followed with deposition of Al thin film to form the bi‐material actuators. The investigations of the mechanical properties and thermal response of CNT microcantilevers indicate that the slipping between the tubes limits both the strength and the thermal sensitivity of the bi‐material microcantilevers. Intertube deposition of Al₂O₃ as ceramic interlocking is used to reinforce the binding strength between the tubes, and increases in the mechanical strength as well as thermal sensitivity of the microcantilevers have been achieved.

中文翻译：

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高度对齐的基于碳纳米管的双材料微执行器，减少了管间打滑

双材料微悬臂梁已广泛用作热传感器和热致动器。碳纳米管（CNT）是双材料致动器的主要候选材料，因为轴向的负热膨胀系数（CTE）具有更高的热敏性。但是，基于CNT的执行器通常不仅会由于组装的CNT之间的相互作用较弱而导致管间打滑，而且还会对定向组件进行不良控制。为了解决这些挑战，本文提出了一种新型的紧密排列，高度对齐的CNT微悬臂，其通过陶瓷互锁增强，然后沉积Al薄膜以形成双材料致动器。对CNT微悬臂梁的机械性能和热响应的研究表明，管之间的滑动会限制双材料微悬臂梁的强度和热敏感性。管间沉积铝_使用2 O ₃作为陶瓷互锁件来增强管之间的结合强度，并且已经实现了微悬臂梁的机械强度以及热灵敏度的提高。