A digital closed-loop system design of a microelectromechanical systems (MEMS) disk resonator gyroscope (DRG) is proposed in this paper. Vibration models with non-ideal factors are provided based on the structure characteristics and operation mode of the sensing element. The DRG operates in force balance mode with four control loops. A closed self-excited loop realizes stable vibration amplitude on the basis of peak detection technology and phase control loop. Force-to-rebalance technology is employed for the closed sense loop. A high-frequency carrier loaded on an anchor weakens the effect of parasitic capacitances coupling. The signal detected by the charge amplifier is demodulated and converted into a digital output for subsequent processing. Considering compatibility with digital circuits and output precision demands, a low passband sigma-delta (ΣΔ) analog-to-digital converter (ADC) is implemented with a 111.8dB signal-to-noise ratio (SNR). The analog front-end and digital closed self-excited loop is manufactured with a standard 0.35 µm complementary metal-oxide-semiconductor (CMOS) technology. The experimental results show a bias instability of 2.1 °/h and a nonlinearity of 0.035% over the ± 400° full-scale range.

中文翻译：

---

基于集成模拟前端的数字闭环MEMS磁盘谐振器陀螺仪电路设计。

本文提出了一种微机电系统（MEMS）磁盘谐振陀螺仪（DRG）的数字闭环系统设计。根据传感元件的结构特性和工作模式，提供了具有非理想因素的振动模型。DRG在具有四个控制回路的力平衡模式下运行。闭环自激环路在峰值检测技术和相位控制环路的基础上实现了稳定的振动幅度。力平衡技术用于闭合感应环路。加载到锚点上的高频载波会削弱寄生电容耦合的影响。电荷放大器检测到的信号被解调并转换为数字输出，以进行后续处理。考虑到与数字电路的兼容性以及对输出精度的要求，一个低通带的sigma-delta（ΣΔ）模数转换器（ADC）实现了111.8dB的信噪比（SNR）。模拟前端和数字闭合自激环路采用标准的0.35 µm互补金属氧化物半导体（CMOS）技术制造。实验结果表明，在±400°满量程范围内，偏置不稳定性为2.1°/ h，非线性为0.035％。