We propose a novel and simple method of single-shot freeform surface profiler based on spatially phase-shifted lateral shearing interferometry. By the adoption of birefringent materials, the laterally shearing waves are simply generated without any bulky and complicated optical components. Moreover, the phase maps that lead to the 3D profile of the freeform surface can be instantly obtained by the spatial phase-shifting technique using a pixelated polarizing camera. The proposed method was theoretically described and verified by measuring several samples in comparison to the measurement results with a well-established stylus probe.

中文翻译：

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单次自由曲面表面轮廓仪。

我们提出了一种基于空间相移横向剪切干涉法的单次自由曲面表面轮廓仪的新颖而简单的方法。通过采用双折射材料，可以简单地产生横向剪切波，而无需任何笨重和复杂的光学组件。此外，可以通过使用像素化偏振相机的空间相移技术立即获得导致自由曲面表面3D轮廓的相位图。理论上描述了所提出的方法，并通过与完善的测针探针比较测量结果来测量几个样品来进行验证。