In the present study, TiO₂/CuO solar cells have been successfully fabricated for the first time using DC reactive magnetron sputtering for application in PV devices. To improve the performance of TiO₂ and CuO solar cells, we increased the oxygen flow rates and substrate temperature during the deposition of TiO₂ and CuO thin films compared with our previous work. The structural features by X-ray diffraction and energy-dispersive X-ray spectroscopy spectrum(s) with the atomic percent were analyzed. Next, scanning electron microscopy images with cross-sections were compared. Finally, current–voltage characteristics (I-V) capacitance–voltage (C-V) were determined. The PV parameters, open circuit voltage, short circuit current, fill factor, and efficiency, were then analyzed and compared. We observed a maximum efficiency of 0.24% and an open circuit voltage of 0.14 V. To the best of our knowledge, we attained the fourth highest efficiency reported to date. The C-V and I-V characteristics were compared with theoretical calculations obtained with the solar cell capacitance simulator, SCAPS, program.

在本研究中，首次使用直流反应磁控溅射成功地制造了TiO ₂ / CuO太阳能电池，并将其用于光伏器件。为了提高TiO ₂和CuO太阳能电池的性能，我们在TiO ₂沉积过程中提高了氧气流速和基板温度与我们以前的工作相比，CuO薄膜。分析了具有原子百分数的X射线衍射和能量色散X射线光谱光谱的结构特征。接下来，比较具有横截面的扫描电子显微镜图像。最后，确定了电流-电压特性（IV）电容-电压（CV）。然后对PV参数，开路电压，短路电流，填充系数和效率进行了分析和比较。我们观察到最大效率为0.24％，开路电压为0.14V。据我们所知，我们达到了迄今为​​止报道的第四高效率。将CV和IV特性与通过太阳能电池电容模拟器SCAPS程序获得的理论计算进行了比较。