In this paper, the cylindrical sheath around the hairpin resonator probe has been varied by applying a dc potential to the hairpin to infer different plasma parameters in an argon/oxygen discharge. As the sheath width increases due to negative bias, the resonance frequency of the hairpin correspondingly shifts toward the lower value. An analytical model based on fluid approximation has been developed to estimate the sheath width variation as a function of applied voltage on the probe. The analytical result is then compared with the well-known capacitance model that assumes a conjugate dielectric region around the hairpin consisting of a pair of cylindrical sheaths and the plasma. Using this method, a wide range of plasma parameters including the electron temperature Te, plasma potential Vp, and electro-negativity parameter αs has been obtained in an electronegative oxygen discharge. The advantage of this method over the conventional floating hairpin resonator probe has been qualitatively discussed.

中文翻译：

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从直流偏置发夹探针的鞘特性推断等离子体参数

在本文中，发夹式谐振器探头周围的圆柱形护套已通过向发夹式施加直流电势而改变，以推断氩/氧放电中的不同等离子体参数。由于负偏压导致鞘宽度增加，发夹的共振频率相应地向较低值移动。已经开发了基于流体近似的分析模型来估计作为探针上施加的电压的函数的护套宽度变化。然后将分析结果与众所周知的电容模型进行比较，该模型假设发夹周围有一个共轭介电区域，由一对圆柱形鞘和等离子体组成。使用这种方法，各种等离子体参数包括电子温度 Te、等离子体电位 Vp、和电负性参数 αs 已在带负电的氧气放电中获得。已经定性讨论了这种方法相对于传统浮动发夹谐振器探头的优势。