Trichlorosilane (TCS), the primary chemical feedstock for production of high‐purity Si used in Si‐based solar cells, is currently manufactured industrially via a non‐catalytic hydrochlorination of metallurgical Si. This process generates a huge amount of undesirable silicon tetrachloride (STC) byproduct. Here we report the synthesis of yolk‐shell‐structured CuO−ZnO−In₂O₃ trimetallic oxide mesocrystal microspheres that can be employed as an efficient catalyst to produce TCS catalytically. The CuO−ZnO−In₂O₃ microspheres with multiple hetero‐interfaces were prepared using a facile solvothermal reaction followed by calcination. We found that differing from a single CuO mesocrystal, the electronic density on Cu atoms in the CuO phase within CuO−ZnO and CuO−ZnO−In₂O₃ can be tuned by varying the composition. When used as a catalyst for Si hydrochlorination reaction to produce TCS, CuO−ZnO−In₂O₃ shows excellent catalytic performance with very high Si conversion and TCS selectivity. Under the same reaction conditions, the TCS yield increased 13 times relative to the catalyst‐free process. This work demonstrates the possibility to decrease the amount of STC needed for the catalytic manufacture of TCS, and provides an approach to the facile synthesis of multi‐component mesocrystal materials with a specific structure.

中文翻译：

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卵黄壳结构的CuO-ZnO-In2O3三金属氧化物中间晶体微球作为生产三氯硅烷的高效催化剂

三氯硅烷（TCS）是生产用于硅基太阳能电池的高纯度硅的主要化学原料，目前是通过冶金硅的非催化氯化氢工业生产的。此过程会产生大量不良的四氯化硅（STC）副产物。在这里，我们报告了蛋黄壳结构的CuO-ZnO-In ₂ O ₃三金属氧化物介晶微球的合成，可以将其用作催化生产TCS的有效催化剂。CuO-ZnO-In ₂ O ₃使用轻松的溶剂热反应，然后煅烧制备具有多个异质界面的微球。我们发现，与单个CuO介晶不同，可以通过改变成分来调节CuO-ZnO和CuO-ZnO-In ₂ O _3中CuO相中Cu原子的电子密度。当用作Si盐酸化反应生产TCS的催化剂时，CuO-ZnO-In ₂ O ₃硅具有出色的催化性能，具有很高的硅转化率和TCS选择性。在相同的反应条件下，相对于无催化剂工艺，TCS产率提高了13倍。这项工作证明了减少催化生产TCS所需的STC量的可能性，并提供了一种简便方法来合成具有特定结构的多组分介晶材料。