A three‐step fabrication process for optically transparent, conducting ITO thin films with an intrinsic inverse opal structure is described. The preparation is based on colloidal crystal templating using polystyrene microspheres (100 nm–600 nm). For the realization of varying periodicities in this structure, different sphere sizes were assembled to monolayers on a substrate by spin coating and infiltrated afterwards similarly. The influence of rotation parameters as well as dispersion concentration was studied. Using this approach different geometries of the surface are accessible by systematically varying the rotation parameters and infiltration volume. The thin films show excellent anti‐reflection behavior, good transmission (>80% in the visible range) as well as a low resistance of 200 Ω/sq compared to other porous ITO interfaces. The properties are very promising for several optoelectronic applications such as in‐ or out‐coupling structures in solar cells and organic light emitting diodes.

中文翻译：

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基于高阶反蛋白石薄膜的光电应用导电ITO接口

描述了具有固有反蛋白石结构的光学透明导电ITO薄膜的三步制造过程。该制备基于使用聚苯乙烯微球（100 nm–600 nm）的胶体晶体模板。为了在该结构中实现变化的周期性，通过旋涂将不同的球形尺寸组装到基板上的单层中，然后类似地进行渗透。研究了旋转参数以及分散体浓度的影响。使用这种方法，可以通过系统地改变旋转参数和渗透量来访问表面的不同几何形状。与其他多孔ITO界面相比，该薄膜具有出色的抗反射性能，良好的透射率（在可见光范围内> 80％）以及200Ω/ sq的低电阻。