The phase formation behavior of carbon-doped TiZrN upon the variation of thermal energy was investigated in terms of microstructure and bonding state. The laser output was changed by 10% in the range of 20% to 70% after covering the carbon paste on the TiZrN coating. Degradation occurred on the coating surface by the laser ablation of 60% and 70% output. Phase analysis and the Rietveld refinement for the coating, which did not exhibit degradation, indicated that the phase fraction of the graphite inside the coating increased as the thermal energy increased. The lattice constant of TiZrN was 0.431 nm initially, but it gradually increased to 0.449 nm at the output of 50%. FIB, Cs-TEM, and TEM-EDS analyzed the formation of (Ti, Zr)C phase and the variation of lattice constant via cross-sectional microstructure and showed the increase in carbon content and carbon-substituted (Ti, Zr)C phase formed along with the existing (Ti, Zr)N phase. XPS analysis for the bonding of the doped carbon indicated that the substitution ratio of the doped carbon was approximately 4.4% at the output of 20%, and the substitution rate increased with increasing thermal energy resulting in 19.6% at the output of 50%. The ZrC phase mostly existed at the output of 20% for the substitutional carbon, and the proportion of the TiC phase increased with the increase in thermal energy, resulting in more than 50%. The formation energy of ZrC phase was lower than that of TiC phase, and the formation energy of TiC was satisfied with the increase in thermal energy. The hardness increased to 38.3 GPa at the output of 50% as the ratio of TiC phase was increased, which was approximately 20% higher than that of the TiZrN.

从微观结构和键合状态研究了碳掺杂TiZrN在热能变化时的相形成行为。在将碳浆覆盖在TiZrN涂层上之后，激光输出在20％至70％的范围内变化了10％。通过60％和70％的输出功率的激光烧蚀，涂层表面发生降解。不表现出降解的涂层的相分析和Rietveld细化表明，涂层内石墨的相分数随热能的增加而增加。TiZrN的晶格常数最初为0.431 nm，但在50％的输出下逐渐增加至0.449 nm。FIB，Cs-TEM和TEM-EDS分析了（Ti，Zr）C相和晶格常数的变化，通过横截面微观结构显示出碳含量的增加以及与现有的（Ti，Zr）N相一起形成的碳取代的（Ti，Zr）C相。对掺杂碳的键合的XPS分析表明，掺杂碳的取代率在20％的输出下约为4.4％，并且随着热能的增加，取代率也随之提高，在50％的输出下代入率为19.6％。ZrC相主要存在于替代碳的20％的输出中，并且TiC相的比例随着热能的增加而增加，从而超过50％。ZrC相的形成能低于TiC相的形成能，并且随着热能的增加，TiC的形成能得到满足。硬度增加到38。