ZnO nanomembranes (NMs) are successfully fabricated by atomic layer deposition for electrochemical supercapacitor applications. The structure and morphology of ZnO NMs are investigated by X-ray diffraction, scanning electron microscopy, X-ray photoelectron spectroscopy, and Raman spectroscopy. In order to prove their potential applications in supercapacitors, the electrochemical performance of ZnO NMs is characterized in the aqueous electrolytes (i.e., KOH, KCl, and Na₂SO₄). Experimental results indicate that 6 M KOH electrolyte is the most promising one, and the largest capacitance of 846 F g⁻¹ is achieved in this electrolyte with remarkable stability. In addition, ZnO NM with 100 ALD cycles demonstrates advanced performance in all three aqueous electrolytes, mainly due to the effective ion adsorption/desorption or extraction/insertion in the electrode. The 180-min flashing of a red LED powered by ZnO NMs supercapacitors suggests great potentials of NMs electrodes in practical applications.

ZnO纳米膜（NMs）是通过原子层沉积成功制备的，用于电化学超级电容器。通过X射线衍射，扫描电子显微镜，X射线光电子能谱和拉曼光谱研究了ZnO NMs的结构和形态。为了证明其在超级电容器中的潜在应用，在水性电解质（即KOH，KCl和Na ₂ SO ₄）中表征了ZnO NMs的电化学性能。实验结果表明，6 M KOH电解质是最有希望的电解质，最大电容为846 F g ^-1该电解质具有显着的稳定性。此外，具有100个ALD循环的ZnO NM在所有三种水性电解质中均具有先进的性能，这主要归因于电极中有效的离子吸附/解吸或萃取/插入。由ZnO NMs超级电容器供电的红色LED闪烁180分钟表明，在实际应用中NMs电极的潜力很大。