Flexible pressure sensors are highly desirable in artificial intelligence, health monitoring, and soft robotics. Microstructuring of dielectrics is the common strategy employed to improve the performance of capacitive type pressure sensors. Herein, a novel, low‐cost, large‐area compatible, and mold‐free technique is reported in which magnetically grown microneedles are self‐assembled from a film of curable magnetorheological fluid (CMRF) under the influence of a vertical curing magnetic field (B_curing). After optimizing the microneedles' fabrication parameters, i.e., magnetic particles' (MPs') concentration and B_curing intensity, piezocapacitive sensors capable of wide range pressure sensing (0–145 kPa) with ultrafast response time (50 ms), high cyclic stability (>9000 cycles), as well as very low detection limit (1.9 Pa) are obtained. Sensor properties are found dependent on microneedles' fabrication parameters that are controllable, produce variable‐sized microneedles, and allow to govern sensing properties according to desired applications. Finally, the sensor is employed in holding a bottle with different weights, human breath, and motion monitoring, which demonstrate its great potential for the applications of human–machine interaction, human health monitoring, and intelligent soft robotics.

中文翻译：

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具有磁性生长微结构的压电容柔性电子皮肤压力传感器

柔性压力传感器在人工智能，健康监测和软机器人中非常需要。电介质的微结构化是提高电容式压力传感器性能的常用策略。本文报道了一种新颖，低成本，大面积兼容且无霉菌的技术，其中在垂直固化磁场的影响下，从可固化的磁流变液（CMRF）膜中自组装磁性生长的微针（B_固化）。优化微针的制造参数后，即磁性粒子（MPs）的浓度和B_固化强度高的压电电容传感器具有宽范围的压力感测（0–145 kPa），超快的响应时间（50 ms），高的循环稳定性（> 9000个循环）和非常低的检测极限（1.9 Pa）。发现传感器属性取决于可控的微针制造参数，可产生尺寸可变的微针，并允许根据所需应用控制传感特性。最后，该传感器用于盛放具有不同重量的瓶子，人的呼吸和运动监测，这证明了其在人机交互，人类健康监测和智能软机器人应用中的巨大潜力。