Reports have recently been published on ultrathin biofluid barriers, which enable the long‐term measurement of biological signals and exhibit conformability on nonlinear surfaces such as skin and organs. However, inorganic‐ and organic‐based barriers have process incompatibility and high water permeability, respectively. Siloxane‐ (inorganic) based fluorinated epoxy (organic) hybrid materials (FEH) are demonstrated for bio‐fluidic barrier and the biocompatibility and barrier performance for flexible electronic systems as solution‐processed oxide thin‐film transistors (TFTs) on 1.2 µm thick polyimide (PI) thin film substrate is confirmed. FEH thin film can be patterned as small as 10 µm through conventional photolithography. The fabricated solution‐processed indium oxide TFTs with FEH barriers exhibit durable performance over 16 h with no dramatic change of transfer characteristics in phosphate‐buffered saline (PBS) environment. Furthermore, to realize FEH barriers for flexible systems, the solution‐processed indium oxide TFTs with FEH barriers on ultrathin PI substrate are demonstrated subjected to compression test and successfully measure the electrical properties with no irreversible degradation during 1000 cycles of mechanical testing in PBS.

中文翻译：

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溶液处理，可光图案化的氟化Sol-Gel杂化材料作为柔性电子系统的生物流体屏障

最近发表了有关超薄生物流体屏障的报告，该屏障能够长期测量生物信号，并在诸如皮肤和器官等非线性表面上表现出一致性。但是，基于无机和有机的屏障分别具有工艺不兼容和高透水性。基于硅氧烷（无机）的氟化环氧（有机）杂化材料（FEH）被证明具有1.2 µm厚的聚酰亚胺溶液处理的氧化物薄膜晶体管（TFT）的生物流体阻隔性，以及柔性电子系统的生物相容性和阻隔性能。 （PI）薄膜基板已确认。通过传统的光刻，FEH薄膜的图案可小至10 µm。带有FEH隔离层的溶液处理氧化铟TFT制备工艺在16小时内表现出持久的性能，在磷酸盐缓冲盐水（PBS）环境中的转移特性没有明显变化。此外，为实现用于柔性系统的FEH阻挡层，对超薄PI基板上具有FEH阻挡层的固溶氧化铟TFT进行了压缩测试，并成功地进行了电学性能测试，在PBS的1000次机械测试循环中没有不可逆降解。