Abstract In the digital holographic microscopy, the phase aberration is a key problem limiting the quantitative phase measurement, especially for the microstructure whose phase distribution is dense with few and discontinuous background region. A numerical phase aberration compensation method with global curve fitting preprocessing and automatic extraction of the background region for microstructure testing is proposed. The global curve fitting is implemented to compensate most of the tilt, quadratic and partial high order aberrations and make the profile of the measured object significantly distinguishable. Then the background region is automatically extracted by directly segmenting the converted grayscale phase image. At last, the Zernike polynomial fitting is performed on the extracted background region, and the obtained coefficients are used to calculate the phase aberration of the whole phase image. Simulation and experimental results demonstrated that the proposed method is able to accurately extract background region and compensate the phase aberration for the complicated dense microstructure.

中文翻译：

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具有曲线拟合预处理和自动背景分割的数字全息显微镜相位像差补偿用于微观结构测试

摘要 在数字全息显微镜中，相位像差是限制定量相位测量的关键问题，尤其是对于相位分布密集、背景区域少且不连续的微观结构。提出了一种具有全局曲线拟合预处理和自动提取背景区域的显微结构检测数值相位像差补偿方法。全局曲线拟合用于补偿大部分倾斜、二次和部分高阶像差，并使被测物体的轮廓具有明显的可区分性。然后通过直接分割转换后的灰度相位图像自动提取背景区域。最后对提取的背景区域进行Zernike多项式拟合，得到的系数用于计算整个相位图像的相位像差。仿真和实验结果表明，该方法能够准确地提取背景区域并补偿复杂致密微观结构的相位畸变。