Abstract The nano scale motions of piezoelectric actuated nano-positioning systems are very sensitive to operating tasks, external disturbances, as well as variations of system dynamics. In this paper, a data-driven Iterative Feedback Tuning (IFT) based Active Disturbance Rejection Control (ADRC) approach is developed to optimize the control performance by conducting controller parameter tuning iteratively from experimental test data. In particular, a parameterized input-output form of the linear ADRC controller is derived for the nano-positioner, where the IFT algorithm is applied to solve the established optimization problem to get the optimal control parameters. The proposed method is verified in simulations where the selection of control criterion and the impact of update step-size are also discussed. Single-axis and dual-axes real-time experiments are finally conducted on an X-Y piezoelectric actuated nano-positioner, which demonstrate significant performance improvement on nano-positioning and tracking over the conventional ADRC method.

中文翻译：

---

基于数据驱动迭代调谐的压电纳米定位器自抗扰控制

摘要 压电驱动纳米定位系统的纳米尺度运动对操作任务、外部干扰以及系统动力学变化非常敏感。在本文中，开发了一种基于数据驱动的迭代反馈调整 (IFT) 的有源抗扰控制 (ADRC) 方法，通过从实验测试数据迭代进行控制器参数调整来优化控制性能。特别是，推导出了纳米定位器的线性 ADRC 控制器的参数化输入输出形式，其中应用 IFT 算法解决已建立的优化问题，以获得最佳控制参数。所提出的方法在仿真中得到验证，其中还讨论了控制标准的选择和更新步长的影响。