In this work, we present a well-supported procedure to fabricate ridge optical waveguides onto thin films of PLZT by femtosecond laser ablation. To achieve smooth-guiding structures that guarantee good optical performance we have studied the characteristics of ablation threshold for different kinematic conditions of fs laser machining and we have also explored the different ablation regimens for several fluences reached. Furthermore, we characterized the morphology and roughness of ridge waveguides through a modal analysis of scattering loss for waveguides conducted by single and multiple scans. An innovative phenomenological model that describes the sidewall roughness to process parameters is proposed in this paper. With this approach, it is possible to extend the manufacturing method of smooth-guiding structures to many optical thin films by fs micromachining, so as to create integrated photonics devices that can be addressed to different technological applications.

在这项工作中，我们提出了一种受支持的程序，可通过飞秒激光烧蚀在PLZT薄膜上制造脊形光波导。为了获得能够确保良好光学性能的平滑导光结构，我们研究了fs激光加工的不同运动学条件下的烧蚀阈值特性，并针对达到的几种通量探索了不同的烧蚀方案。此外，我们通过对单次和多次扫描进行的波导散射损耗的模态分析，对脊形波导的形貌和粗糙度进行了表征。本文提出了一种创新的现象学模型，该模型描述了侧壁粗糙度与工艺参数的关系。用这种方法