Abstract In this study, we report a direct deposition of three-dimensional freestanding nanostructures of platinum-doped ceria films on holey carbon coated copper transmission electron microscopy (TEM) grid by direct liquid injection chemical vapor deposition (DLI-CVD). TEM was then directly performed on the pristine thin films, without any kind of mechanical or ion thinning. High-resolution TEM reveals that highly porous and crystallized layers were deposited over the whole membrane. The existence of platinum in the ceria grains was confirmed by Energy Dispersive X-ray Spectroscopy (EDS) and X-ray Photoelectron Spectroscopy (XPS). Moreover, the substitution of carbon membrane by Pt-CeO2 layer was highlighted by Electron Energy Loss Spectroscopy (EELS), showing that the Pt-CeO2 nanofilms are freestanding. These results are very promising and represent an important step for performing specific nanoscale TEM analyses necessary for the study of the growth mechanism of nanofilms on substrates.

中文翻译：

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通过透射电子显微镜直接研究自支撑 Pt 掺杂的氧化铈纳米膜

摘要 在这项研究中，我们报告了通过直接液体注入化学气相沉积 (DLI-CVD) 在多孔碳涂层铜透射电子显微镜 (TEM) 网格上直接沉积铂掺杂氧化铈薄膜的三维独立纳米结构。然后直接在原始薄膜上进行 TEM，没有任何机械或离子减薄。高分辨率 TEM 显示高度多孔和结晶层沉积在整个膜上。通过能量色散 X 射线光谱 (EDS) 和 X 射线光电子光谱 (XPS) 证实了氧化铈颗粒中铂的存在。此外，Pt-CeO2 层对碳膜的替代通过电子能量损失光谱 (EELS) 得到了强调，表明 Pt-CeO2 纳米膜是独立的。