Abstract AlCrN/TiSiN nanomultilayer coatings, basically consisting of single-phase fcc-AlCrTiSiN solid solution, were prepared by co-deposition method with Al30Cr70 and Ti72Si18 targets. With substrate negative bias voltage increase from 50 V to 110 V, the hardness of nanomulitlayer coatings is increased from 32.1 GPa to 36.5 GPa, and the growth behavior changes from (2 0 0)fcc preferred orientation to coexistence of both (2 0 0)fcc and (1 1 1)fcc preferred orientation. Low interfacial energy supports the epitaxial growth, resulting in an increase in strain energy of coating systems due to the lattice misfit between neighboring sublayers. Increased strain energy is overcompensated by the formation of interfacial dislocations and dislocation loops as well as fcc-AlCrTiSiN nano-twins and hcp-AlN clusters at twin boundaries. Additionally, the Cr-ion etching induces to form a thin amorphous loose layer (LL) between coating and steel substrate during the pretreatment process. High substrate bias voltage promotes the transformation of amorphous phase to the (Cr,Fe)N solid solution during the coating deposition process, resulting in a notable increase in adhesion strength.

中文翻译：

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fcc单相固溶体组成的AlCrN/TiSiN纳米多层涂层的微观结构和力学性能

摘要 采用Al30Cr70和Ti72Si18靶材共沉积法制备了主要由单相fcc-AlCrTiSiN固溶体组成的AlCrN/TiSiN纳米多层涂层。随着衬底负偏压从50 V增加到110 V，纳米多层涂层的硬度从32.1 GPa增加到36.5 GPa，生长行为从（2 0 0）fcc择优取向转变为（2 0 0）共存fcc 和 (1 1 1)fcc 首选方向。低界面能支持外延生长，由于相邻子层之间的晶格失配，导致涂层系统的应变能增加。通过形成界面位错和位错环以及在孪晶边界处的 fcc-AlCrTiSiN 纳米孪晶和 hcp-AlN 簇，增加的应变能被过度补偿。此外，在预处理过程中，铬离子蚀刻诱导在涂层和钢基材之间形成薄的非晶松散层 (LL)。在涂层沉积过程中，高衬底偏压促进非晶相向（Cr，Fe）N固溶体的转变，从而导致粘附强度显着增加。