This letter presents the design and fabrication of a 287-GHz resonator and a bandpass filter. The fabrication is conducted using an additive microfabrication process, based on successive photolithography and metal electroplating steps. This process has allowed the fabrication of a single-cavity resonator and a 3.5% relative bandwidth two-pole bandpass filter. The cavity has a measured unloaded $Q$ of 137, and the filter has a measured loss of 4.6 dB and matching better than 20 dB in very good agreement with E-M simulation results.

中文翻译：

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两极 287GHz 波导带通滤波器的设计和附加微制造

这封信介绍了 287 GHz 谐振器和带通滤波器的设计和制造。该制造是使用基于连续光刻和金属电镀步骤的增材微制造工艺进行的。该工艺允许制造单腔谐振器和 3.5% 相对带宽的两极带通滤波器。空腔有一个测量的卸载 $Q$ 137，滤波器的测量损耗为 4.6 dB，匹配优于 20 dB，与 EM 仿真结果非常吻合。