We propose a new experimental method in microsphere-assisted interference microscopy, making possible to reconstruct surface topographies as much with high quantitative depth accuracy as when the transversal features sizes are smaller than the classical diffraction limit. The full-field super-resolution interference microscope consists not only of one glass microsphere in the object arm, but also of a second similar microsphere in the reference arm. By compensating the sphere aberrations in the two interference arms, the spatial resolution appears to be considerably increased. The increase in 3D spatial resolution allows the topography reconstruction of 300-nm-width grating lines and 200-nm-diameter transparent nanopillars.

中文翻译：

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补偿微球辅助干涉显微镜

我们提出了一种新的微球辅助干涉显微镜实验方法，使得当横向特征尺寸小于经典衍射极限时，能够以高定量深度精度重建表面形貌。全视野超分辨率干涉显微镜不仅由物镜臂中的一个玻璃微球组成，而且由参比臂中的第二个类似微球组成。通过补偿两个干涉臂中的球面像差，空间分辨率似乎大大提高了。3D空间分辨率的提高允许对300 nm宽度的光栅线和200 nm直径的透明纳米柱进行地形重建。