We report, to the best of our knowledge, the first Raman sensor for broadband vapor-phase volatile organic compounds (VOCs) based on silicon nitride waveguides functionalized with a mesoporous silica top-cladding. The Raman response of low-concentration VOC gases is evanescently probed via a centimeter-long functionalized slot waveguide. Thanks to the four-orders-of-magnitude concentration factor offered by the mesoporous coating, the detection limit of acetone, ethanol, and isopropyl alcohol (IPA) is determined to be 594, 157, and 53 ppm, respectively, with 1 s measurement time in the current setup. Capable of multiplex gas sensing in a complex matrix through fast and reversible adsorption, the demonstration paves the way to on-site continuous VOC monitoring.

中文翻译：

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具有介孔富集层功能化的纳米光子缝隙波导的多重挥发性有机化合物拉曼传感

据我们所知，我们报道了首个基于宽带氮化硅波导的拉曼传感器，用于宽带气相挥发性有机化合物（VOC），该氮化硅波导具有介孔二氧化硅顶部覆层。低浓度VOC气体的拉曼响应通过一厘米长的功能化缝隙波导进行了probe逝探测。得益于中孔涂层提供的四个数量级的浓度因子，丙酮，乙醇和异丙醇（IPA）的检出限分别为1 s，594 ppm，157 ppm和53 ppm。当前设置中的时间。该演示能够通过快速且可逆的吸附在复杂基质中进行多种气体传感，为现场连续VOC监测铺平了道路。