Abstract This paper presents the design, analysis, and control of a novel compact, large range 1-DOF micro manipulation mechanism. Leaf flexures were incorporated into a modular multilayer design configuration to achieve large range motion with a high natural frequency. The modular design of the proposed mechanism makes it usable as a building block to construct higher DOF-mechanisms. Computational analysis was conducted to verify the static and dynamic responses of the proposed mechanism and to ensure low flexures stress, high natural frequency, and large workspace. The mathematical model was developed to establish the derivation of a robust observer-based Sliding Mode (SM) controller. To improve the precision of tracking performance, the SM controller was augmented with adaptive Fuzzy Disturbance Observer (SM-FDO). Another robust control technique (H∞) was implemented in this work to characterize and compare the performance of SM-FDO. The mechanism was fabricated using 3D printing technology and a Voice Coil Motor (VCM) was used to deliver the actuation for its capability to provide large displacements. Experiments were performed to verify the computational modeling of the proposed mechanism and to evaluate the performance of the developed controllers. Several experimental results showed that the adaptive nature of SM-FDO allowed this controller to have superior robustness and tracking performance over the other implemented robust controller.

中文翻译：

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基于模糊扰动观测器的新型一自由度微定位机构控制方法

摘要 本文介绍了一种新型紧凑型大范围一自由度微操纵机构的设计、分析和控制。叶片弯曲被纳入模块化多层设计配置，以实现高自然频率的大范围运动。所提出机制的模块化设计使其可用作构建更高自由度机制的构建块。进行计算分析以验证所提出机构的静态和动态响应，并确保低弯曲应力、高固有频率和大工作空间。开发数学模型是为了建立基于观测器的稳健滑模 (SM) 控制器的推导。为了提高跟踪性能的精度，SM控制器增加了自适应模糊干扰观察器（SM-FDO）。在这项工作中实施了另一种鲁棒控制技术 (H∞) 来表征和比较 SM-FDO 的性能。该机构是使用 3D 打印技术制造的，并且使用音圈电机 (VCM) 来提供驱动，因为它具有提供大位移的能力。进行了实验以验证所提出机制的计算建模并评估开发的控制器的性能。几个实验结果表明，SM-FDO 的自适应特性使该控制器具有优于其他实现的鲁棒控制器的鲁棒性和跟踪性能。该机构是使用 3D 打印技术制造的，并且使用音圈电机 (VCM) 来提供驱动，因为它具有提供大位移的能力。进行了实验以验证所提出机制的计算建模并评估开发的控制器的性能。几个实验结果表明，SM-FDO 的自适应特性使该控制器具有优于其他实现的鲁棒控制器的鲁棒性和跟踪性能。该机构是使用 3D 打印技术制造的，并且使用音圈电机 (VCM) 来提供驱动，因为它具有提供大位移的能力。进行了实验以验证所提出机制的计算建模并评估开发的控制器的性能。几个实验结果表明，SM-FDO 的自适应特性使该控制器具有优于其他实现的鲁棒控制器的鲁棒性和跟踪性能。