A MEMS tunable integrated waveguide Bragg grating-based filter for C-band optical dense wavelength-division multiplexing (DWDM) network is presented and analyzed in this work. Waveguide Bragg grating being a notch filter in the transmission spectrum is used to realize a tunable filter by varying the applied voltages to the fixed–fixed beam loaded with this grating. The strain across the grating is enhanced by choosing MEMS beam configuration such that the metal electrode is the bottom-most layer of the composite fixed–fixed beam. Device dimensions are chosen to achieve a narrow full width half maximum of 0.77 nm, allowing filtering of adjacent channels of 100 GHz DWDM network. A large Bragg wavelength shift of 10.4 nm (1552.52–1562.92 nm) was achieved at 45.8 V actuation providing tuning for 14 DWDM channels with inter-channel cross talk below − 21 dB, with tuning range of 1.3 THz.

中文翻译：

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MEMS可调SOI波导布拉格光栅滤波器，调谐范围为1.3 THz，适用于C波段100 GHz DWDM光网络

在这项工作中，提出并分析了用于C波段光密集波分复用（DWDM）网络的MEMS可调谐集成波导布拉格光栅滤波器。波导布拉格光栅是透射光谱中的陷波滤波器，用于通过改变加载到该光栅的固定光束上的施加电压来实现可调谐滤波器。通过选择MEMS光束配置，可以增强光栅上的应变，从而使金属电极成为复合固定-固定光束的最底层。选择器件尺寸以实现0.77 nm的窄半峰宽，从而可以过滤100 GHz DWDM网络的相邻信道。45时实现了10.4 nm（1552.52–1562.92 nm）的大布拉格波长偏移。