Abstract In an effort to improve the surface properties of electrical contact materials in terms of high friction coefficient and wear rate, diamond-like carbon (DLC) films containing different metal elements were prepared on stainless steel substrates using an unbalanced magnetron sputtering system. In the present study, the effect of current-carrying on DLC film, Cu-doped DLC film (Cu/DLC), and Ti-doped DLC film (Ti/DLC) is reported. The structure and mechanical properties of the films were characterized systematically by scanning electron microscopy (SEM), energy-dispersive spectroscopy (EDS), and Raman spectra; these methods were also used to analyze the initial surface of the films. Moreover, the tribological behaviors of the films sliding against AISI 52100 steel with and without an electric current (1 A) applied were investigated using a tribometer with ball-on-disc configuration in an atmospheric environment. The results demonstrated that the friction coefficients of DLC and Cu/DLC under current-carrying condition were decreased, whereas Ti/DLC showed opposite experimental results. The wear rate of the films with a current was higher than that without a current. Therefore, this study is meaningful to understand the tribological behaviors of microelectromechanical systems.

中文翻译：

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载流条件下金属掺杂DLC薄膜的摩擦磨损性能

摘要 为了改善电接触材料在高摩擦系数和磨损率方面的表面性能，使用非平衡磁控溅射系统在不锈钢基板上制备了含有不同金属元素的类金刚石（DLC）薄膜。在本研究中，报告了载流对 DLC 膜、Cu 掺杂 DLC 膜 (Cu/DLC) 和 Ti 掺杂 DLC 膜 (Ti/DLC) 的影响。通过扫描电子显微镜（SEM）、能量色散光谱（EDS）和拉曼光谱系统地表征了薄膜的结构和机械性能；这些方法也用于分析薄膜的初始表面。而且，在大气环境中使用具有球盘结构的摩擦计研究了在施加和不施加电流 (1 A) 的情况下在 AISI 52100 钢上滑动的薄膜的摩擦学行为。结果表明，在载流条件下，DLC 和 Cu/DLC 的摩擦系数降低，而 Ti/DLC 的实验结果相反。有电流时薄膜的磨损率高于无电流时。因此，本研究对于了解微机电系统的摩擦学行为具有重要意义。有电流时薄膜的磨损率高于无电流时。因此，本研究对于了解微机电系统的摩擦学行为具有重要意义。有电流时薄膜的磨损率高于无电流时。因此，本研究对于了解微机电系统的摩擦学行为具有重要意义。