The morphology and electrical microstructure of different anodic oxide films on aluminum and thermic oxide on surface p-type silica (KDB/100) were studied using atomic force microscopy and scanning capacitance microscopy. It was shown that the small basic element in the texture of both thin (0.05 microm) and thick (0.8 microm) oxide films represents a disklike element ('grain') approximately 200x200x30 nm in size. For films with a rough surface relief, the capacitance (and consequently, the surface potential) shows strong fluctuations in the vicinity of coarse (approximately 5-8 microm) pores. Because of this, the image of the surface obtained using atomic force microscopy does not coincide with that obtained by scanning capacitance microscopy (the opposite contrast effect). The manifestation of the opposite contrast correlates with an increase in the surface potential of the anodic oxide films measured by an independent method. A series of experiments under atmospheric conditions at different distances from the end of the cantilever to the surface of anodic oxide films showed that the influence of the surface field is detectable at long distances (up to 0.7 microm). It was shown that at a test temperature of 120 degrees C, the opposite contrast disappears: the images obtained in the semicontact (atomic force microscopy) and non-contact (scanning capacitance microscopy) modes coincide with each other. The results obtained suggest a relationship between the formation of electrostatic nanosized irregularities at the surface of oxide films and the sorption of water molecules under atmospheric conditions.

中文翻译：

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氧化铝和二氧化硅表面上的远距离静电力。

利用原子力显微镜和扫描电容显微镜研究了铝上不同的阳极氧化膜和表面p型二氧化硅（KDB / 100）上的热氧化膜的形貌和电显微结构。结果表明，薄的（0.05微米）氧化膜和厚的（0.8微米）氧化膜都具有小的基本元素，代表了大小约为200x200x30 nm的盘状元素（“颗粒”）。对于具有粗糙表面起伏的薄膜，电容（因此，表面电势）在粗糙（大约5-8微米）的孔附近显示出强烈的波动。因此，使用原子力显微镜获得的表面图像与通过扫描电容显微镜获得的表面图像不一致（相反的对比效果）。相反对比度的显现与通过独立方法测量的阳极氧化膜的表面电势的增加相关。在大气条件下，从悬臂末端到阳极氧化膜表面的不同距离进行的一系列实验表明，可以在远距离（最大0.7微米）处检测到表面场的影响。结果表明，在120摄氏度的测试温度下，相反的对比度消失了：在半接触（原子力显微镜）和非接触（扫描电容显微镜）模式下获得的图像彼此重合。获得的结果表明，在大气条件下，氧化膜表面的静电纳米尺寸不规则形成与水分子的吸附之间存在关系。