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Specific features of the miniature ionisation BSE multi-detector unit for 3D imaging in environmental conditions.
Micron ( IF 2.4 ) Pub Date : 2019-09-09 , DOI: 10.1016/j.micron.2019.102752
Witold Slówko 1
Affiliation  

The author has been striving to develop SEM equipment that could extend the capabilities of standard instruments to allow advanced environmental techniques, including 3D imaging. Now its improved version is presented in a form of the miniature ionisation multi-detector unit that can be accommodated inside a bore of the objective lens and does not limit the minimal Working Distance (WD). The miniature detector unit seems well suited to VP/ESEM of any type to be used instead a standard Pressure Limiting Aperture and even to the classic SEM when combined with the vacuum-detector head and an intermediate vacuum system. An acceptable pressure of the environmental gas (preferably water vapour of ca 10 hPa) and the capability of 3D imaging make this solution particularly suitable in applications for highly hydrated samples of smooth surfaces. The unit can also deliver an abundance of signals which may be a source of better contrasts and additional information when digitally processed. Its present investigations are focused on the surface shape fidelity obtainable with the system working in gaseous environment of air or water and tested on metal and glass wires or hydrated organic samples. The detector unit may be reckoned an underpass electron energy filter which facilitates imaging details under sample surface, the feature demanded strongly in biomedical applications.

中文翻译:

用于环境条件下3D成像的微型电离BSE多探测器单元的特定功能。

作者一直在努力开发SEM设备,该设备可以扩展标准仪器的功能,以支持包括3D成像在内的先进环境技术。现在,它的改进版本以微型电离多探测器单元的形式展示,该单元可以容纳在物镜的孔内,并且不限制最小工作距离(WD)。当与真空探测器头和中真空系统结合使用时,微型探测器单元似乎非常适合于使用任何类型的VP / ESEM代替标准的压力限制孔径,甚至适合经典的SEM。可接受的环境气体压力(最好是大约10 hPa的水蒸气)和3D成像功能使该解决方案特别适用于高度水合的光滑表面样品的应用。该单元还可以传送大量的信号,这些信号在进行数字处理时可能是更好的对比度和附加信息的来源。它目前的研究集中于在空气或水的气态环境中使用该系统可获得的表面形状保真度,并在金属和玻璃丝或水合有机样品上进行了测试。探测器单元可以算作是地下电子能量过滤器,该过滤器有助于在样品表面下成像细节,这是生物医学应用强烈要求的特征。它目前的研究集中于在空气或水的气态环境中使用该系统可获得的表面形状保真度,并在金属和玻璃丝或水合有机样品上进行了测试。探测器单元可以算作是地下电子能量过滤器,该过滤器有助于在样品表面下成像细节,这是生物医学应用强烈要求的特征。它目前的研究集中于在空气或水的气态环境中使用该系统可获得的表面形状保真度,并在金属和玻璃丝或水合有机样品上进行了测试。探测器单元可以算作是地下电子能量过滤器,该过滤器有助于在样品表面下成像细节,这是生物医学应用强烈要求的特征。
更新日期:2019-11-01
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