We demonstrate a micro-electro-mechanical systems (MEMS) beam scanner capable of biaxial scanning with simultaneous focus control, for integration into a handheld confocal microscope for skin imaging. The device is based on a dual-axis gimbal structure with an integrated large-stroke deformable mirror. SU-8 polymer is used to construct both the deformable membrane as well as the torsional hinges for biaxial scanning. The 4-mm-diameter mirror can perform raster pattern scanning with a range of +/−1.5° and Lissajous scanning with a range of +/−3° (mechanical scan angle), and has a maximum deflection of $9~\mu \text{m}$ for focus control. The design, fabrication, and characterization of the opto-mechanical performance of the MEMS device are presented in this paper. [2018-0074]

中文翻译：

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具有 SU-8 膜和挠性件的 MEMS 3-D 扫描镜，用于高数值孔径显微镜

我们展示了一种微机电系统 (MEMS) 光束扫描仪，能够进行双轴扫描和同步聚焦控制，用于集成到手持式共聚焦显微镜中进行皮肤成像。该设备基于双轴云台结构，集成大行程变形镜。SU-8 聚合物用于构建可变形膜以及用于双轴扫描的扭转铰链。4 毫米直径的反射镜可以进行 +/-1.5° 范围内的光栅图案扫描和 +/-3°（机械扫描角）范围内的 Lissajous 扫描，并且最大偏转为 $9~\mu \text{m}$ 用于对焦控制。本文介绍了 MEMS 器件光机械性能的设计、制造和表征。[2018-0074]