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Multi-Photon Vertical Cross-Sectional Imaging With a Dynamically-Balanced Thin-Film PZT z-Axis Microactuator
Journal of Microelectromechanical Systems ( IF 2.7 ) Pub Date : 2017-10-01 , DOI: 10.1109/jmems.2017.2701798
Jongsoo Choi 1 , Xiyu Duan 2 , Haijun Li 2 , Thomas D Wang 3 , Kenn R Oldham 4
Affiliation  

Use of a thin-film piezoelectric microactuator for axial scanning during multi-photon vertical cross-sectional imaging is described. The actuator uses thin-film lead-zirconate-titanate to generate the upward displacement of a central mirror platform micro-machined from a silicon-on-insulator wafer to dimensions compatible with endoscopic imaging instruments. Device modeling in this paper focuses on the existence of frequencies near device resonance producing vertical motion with minimal off-axis tilt, even in the presence of multiple vibration modes and non-uniformity in fabrication outcomes. Operation near rear resonance permits large stroke lengths at low voltages relative to other vertical microactuators. Highly uniform vertical motion of the mirror platform is a key requirement for vertical cross-sectional imaging in the remote scan architecture being used for multi-photon instrument prototyping. The stage is installed in a benchtop testbed in combination with an electrostatic mirror that performs in-plane scanning. Vertical sectional images are acquired from 15- $\mu \text{m}$ diameter beads and excised mouse colon tissue. [2017-0073]

中文翻译:

具有动态平衡薄膜 PZT z 轴微致动器的多光子垂直截面成像

描述了在多光子垂直截面成像过程中使用薄膜压电微致动器进行轴向扫描。致动器使用锆钛酸铅薄膜来产生从绝缘体上硅晶片微加工到与内窥镜成像仪器兼容的尺寸的中央反射镜平台的向上位移。本文中的器件建模侧重于器件共振附近频率的存在,即使在存在多种振动模式和制造结果不均匀的情况下,也会产生具有最小离轴倾斜的垂直运动。相对于其他垂直微执行器,在后共振附近的操作允许在低电压下的大行程长度。反射镜平台高度均匀的垂直运动是用于多光子仪器原型的远程扫描架构中垂直截面成像的关键要求。该载物台安装在台式测试台上,并与执行平面扫描的静电镜结合使用。从 15-$\mu\text{m}$ 直径的珠子和切除的小鼠结肠组织中获取垂直截面图像。[2017-0073]
更新日期:2017-10-01
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