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Patterned Plasmonic Surfaces—Theory, Fabrication, and Applications in Biosensing
Journal of Microelectromechanical Systems ( IF 2.7 ) Pub Date : 2017-08-01 , DOI: 10.1109/jmems.2017.2699864
Hamid T Chorsi 1 , Ying Zhu 1 , John X J Zhang 1
Affiliation  

Low-profile patterned plasmonic surfaces are synergized with a broad class of silicon microstructures to greatly enhance near-field nanoscale imaging, sensing, and energy harvesting coupled with far-field free-space detection. This concept has a clear impact on several key areas of interest for the microelectromechanical systems community, including but not limited to ultra-compact microsystems for sensitive detection of small number of target molecules, and “surface” devices for optical data storage, micro-imaging, and displaying. In this paper, we review the current state-of-the-art in plasmonic theory, as well as derive design guidance for plasmonic integration with microsystems, fabrication techniques, and selected applications in biosensing, including refractive-index based label-free biosensing, plasmonic integrated lab-on-chip systems, plasmonic near-field scanning optical microscopy, and plasmonics on-chip systems for cellular imaging. This paradigm enables low-profile conformal surfaces on microdevices, rather than bulk material or coatings, which provide clear advantages for physical, chemical, and biological-related sensing, imaging, and light harvesting, in addition to easier realization, enhanced flexibility, and tunability. [2016-0294]

中文翻译:

图案化等离子表面——生物传感中的理论、制造和应用

低剖面图案化等离子体表面与广泛的硅微结构相结合,可大大增强近场纳米级成像、传感和能量收集以及远场自由空间检测。这个概念对微机电系统社区感兴趣的几个关键领域产生了明显的影响,包括但不限于用于敏感检测少量目标分子的超紧凑微系统,以及用于光学数据存储、微成像的“表面”设备,并显示。在本文中,我们回顾了等离子体理论的当前最新技术,并为等离子体与微系统、制造技术和生物传感中的选定应用(包括基于折射率的无标记生物传感)集成的设计指南,等离子体集成芯片实验室系统,等离子体近场扫描光学显微镜和用于细胞成像的等离子体片上系统。这种范式可在微器件上实现低剖面保形表面,而不是大块材料或涂层,除了更容易实现、增强的灵活性和可调谐性之外,这为物理、化学和生物相关的传感、成像和光收集提供了明显的优势. [2016-0294]
更新日期:2017-08-01
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