We demonstrate an electrowetting-based liquid optical phase shifter. The phase shifter consists of two immiscible liquid layers with different refractive indices. Sandwiched between the two liquids is a rigid membrane that moves freely along the optical axis and is supported by a compliant surround. When applied with a pressure, the thicknesses of both liquid layers change, which induces a difference in optical path, resulting in a phase shift. A miniaturized electrowetting-based actuator is used to produce hydraulic pressure. A multi-layered SU8 bonded structure was fabricated. A phase shift of 171° was observed when the device was incorporated in the Mach–Zehnder interferometer and driven with 100 V. [2016-0201]

中文翻译：

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带有嵌入式电润湿驱动器的液体光学移相器

我们展示了一种基于电润湿的液体光学移相器。移相器由具有不同折射率的两个不混溶的液体层组成。夹在两种液体之间的是一个刚性膜，它可以沿着光轴自由移动，并由柔顺的环绕物支撑。当施加压力时，两个液体层的厚度都会发生变化，这会导致光路不同，从而导致相移。小型化的基于电润湿的致动器用于产生液压。制造了多层SU8键合结构。当该器件集成到 Mach-Zehnder 干涉仪中并以 100 V 驱动时，观察到 171° 的相移。 [2016-0201]