We report on a flow velocity measurement technique based on snap-through detection of an electrostatically actuated, bistable micromechanical beam. We show that induced elecro-thermal Joule heating, and the convective air cooling change the beam curvature and consequently, the critical snap-through voltage ( $V_{\text {ST}}$ ). Using single crystal silicon beams, we demonstrate the snap-through voltage to flow velocity sensitivity of $dV_{\text {ST}}/du \approx 0.13$ V s m⁻¹ with a power consumption of $\approx 360~\mu \text{W}$ . Our experimental results were in accord with the reduced order, coupled, thermo-electro-mechanical model prediction. We anticipate that electrostatically induced snap-through in curved, micromechanical beams will open new directions for the design and implementation of downscaled flow sensors for autonomous applications and environmental sensors. [2018-0131]

中文翻译：

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基于弯曲微机械梁快速通过检测的流量传感器

我们报告了基于静电驱动的双稳态微机械光束的快速通过检测的流速测量技术。我们表明，感应电热焦耳加热和对流空气冷却改变了梁曲率，从而改变了临界击穿电压（ $V_{\text {ST}}$ ）。使用单晶硅梁，我们证明了瞬穿电压对流速的敏感性 $dV_{\text {ST}}/du \approx 0.13$ V sm ^-1功耗为 $\大约 360~\mu \text{W}$ . 我们的实验结果符合降阶、耦合、热机电模型预测。我们预计，弯曲的微机械梁中的静电感应快速通过将为自主应用和环境传感器的小型流量传感器的设计和实施开辟新的方向。[2018-0131]