Strain analysis from high-resolution transmission electron microscopy (HRTEM) images offers a convenient tool for measuring strain in materials at the atomic scale. In this paper we present a theoretical study of the precision and accuracy of surface strain measurements directly from aberration-corrected HRTEM images. We examine the influence of defocus, crystal tilt and noise, and find that absolute errors of at least 1–2% strain should be expected. The model structures include surface relaxations determined using molecular dynamics, and we show that this is important for correctly evaluating the errors introduced by image aberrations.

中文翻译：

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从纳米粒子的透射电子显微镜图像测量表面应变的准确性。

来自高分辨率透射电子显微镜（HRTEM）图像的应变分析为以原子级测量材料中的应变提供了一种方便的工具。在本文中，我们直接从像差校正的HRTEM图像中对表面应变测量的精度和准确性进行了理论研究。我们检查了散焦，晶体倾斜和噪声的影响，发现应该期望至少出现1-2％应变的绝对误差。模型结构包括使用分子动力学确定的表面弛豫，我们证明这对于正确评估由图像像差引入的误差非常重要。